CVI- 1200 system is consist of high temperature tubular furnace, vacuum pressure control system, over- voltage protection and condensation, etc. It can do mixed gas chemical vapor deposition and diffusion experiment. And vacuum can reach 0.1 mbar.
Main function and Features:
1. In high temperature experimental process, can work with the pressure control device to achieve precise control of negative pressure;
2. Digital mass flow control system is proposed of multicomponents. It can obtain precision measurement and control of gas flow; Each gas pipes are equipped with high- pressure check valve, to ensure the safety, continuous and uniform of protection, reduction, replacement atmosphere gas in the quartz tube;
3. The exhaust volatiles minus 20 degrees condenser deposition, in order to do the collection and processing;
4. Adopted KF fast sealing flange, convenient loading and unloading; Pipeline used the world's top Swagelok ferrule connections, no leakage;
5. When over temperature, overvoltage will automatically cut off the heating power and stop inlet gas. Used more safe and reliable.
Main Uses:
Universities, research institutes, industrial and mining enterprises to do high- temperature atmosphere sintering, atmosphere restoring and CVD / CVI experiment, especially suitable for
vacuum coating, nano- film material producing and Chemical vapor infiltration of carbon fiber composite materials.
Technical Parameter:
SGL-1200L Vacuum Tubular furnace | 1) Double shell with cooling system, ensure furnace surface in low temperature; 2) Adopt imported polycrystalline fiber vacuum absorption furnace chamber, good heating preservation; 3) Resistance wire is used high quality resistance alloy silk 0Cr27Al7Mo2, servicing time more longer. Max temperature can reach 1200℃. |
Power supply | AC220V 50HZ/60HZ; Rated power: 4KW |
Furnace tube | High pure quartz tube, size: Φ80*1000mm; Corundum support parts ensure specimen in the middle of heating zone |
Flange | 1) SUS304 stainless steel flange (water cooling type), with ‘o-ring’ seal; 2) Adopted KF quick flange sealing, only need a clamp flange the connection can be done. It is very convenient to put and take the specimen. |
Heating system | 1) High quality resistance wire ( alloy silk 0Cr27Al7Mo2), long time service time; 2) Heating zone length: 300mm 3) Constant heating zone length: 150mm 4) Working temperature: ≤1150℃ 5) Max. temperature: 1200℃ 6) Heating rate: ≤10℃/min (recommend) |
Temperature control system | 1) Adopted artificial intelligence technology, with PID control, self - tuning function, 30 the heating and cooling program; 2) Thermocouple: N-type 3) Constant temperature accuracy: ±1℃ 4) Over-temperature or thermocouple damage alarm, leakage protection, ensure safe and reliable operation. |
HQZ-IV Gas mixing system | 1) 4 routes gas delivery with mass flow meter automatic control gas flow rate; 2) With stainless steel material gas mixing tank, each gas route equipped with check valve; 3) Gas flow range: 0-30SLM 4) Gas flow accuracy: ±1.0%F.S |
Vacuum system | 1) Use German vacuubrand MV2NT VARIO pump, stepless control, achieve negative pressure precision control, Ultimate vacuum up 0.1mabr; 2) Can long time continuous working, no need worry pump too heat and working interrupted; 3) Adopted capacitive ceramic diaphragm vacuum gauge + controller, very easy operation; 4) With exhaust gas treatment system |
Condensate Systems | 1) Low-temperature thermostat bath, the lowest temperature can reach to -20 ℃; 2) Integrated stainless steel vacuum condensation tank, use KF type connection, easy to clean the tank. 3) Cold liquid in tank can be take out, flow into experimental container, also can do some low temperature or constant temperature experiments in the tank directly. |