The CVD-1700 system consists of SGL-1700 vacuum tube furnace, HQF-Ⅲ floating mixing system, built-in temperature measurement system and vacuum system. Sintering temperature of this system can reach up to 1700℃; Vacuum pump with bipolar rotary vane vacuum pump, vacuum degree can reach 5x10-1 Torr; Can achieve 1 ~ 3 gas circuit mixing; built-in temperature measurement system can be real-time monitoring of the temperature inside the reaction tube.
Main features and features:
1, High vacuum system consists of two-stage rotary vane vacuum pump and molecular pump, the maximum vacuum up to 0.0001Pa;
2, With the pressure control instrument to control the gas pressure to achieve the precise control of negative pressure;
3, Digital mass flow control system is composed of Multiple mass flowmeter,flow display and other components ,to achieve the gas flow of precision measurement and control; Each gas pipeline is equipped with high pressure check valve to ensure the safety of the system and continuous Uniformity.
4, Using KF fast flange seal, easy loading and unloading; pipeline using the world's top Swagelok cutting ferrule to connect, no leakage;
5, Over-temperature, over voltage, automatically cut off the heating power and flow meter air inflow, the use of safe and reliable.
The main application:
For colleges and universities, research institutes, industrial and mining enterprises to do high temperature atmosphere sintering,atmosphere reduction, CVD / CVI experiments, especially for vacuum coating, nano-thin film preparation, nanowire growth, dry battery material sintering and other places.
main technical parameters:
SGL-1700 Vacuum tube furnace | Double-layer furnace shell with air-cooled system, effectively guarantee the surface temperature of the shell; Japanese technology vacuum adsorption molding of high-quality high-purity alumina polycrystalline fiber curing furnace, good insulation properties Heating element using imported high-quality U-shaped silicon molybdenum rod, the surface load is high, greatly improving its service life |
Voltage | AC220V 50/60Hz |
Power | 6KW |
Furnace tube | Using 99 alumina corundum tube, high density, durable, not easy to break Size: Φ40 / 60/80 * / 1000mm 4 pieces of alumina pipe block |
Flange and support | SUS304 stainless steel rapid water-cooled flange, long-term water-cooled,non-corrosive A clamp will be able to complete the flange connection, put in, take out the material, convenient and quick. Adjustable flange support, balance the tube support Including inlet air, outlet air, vacuum pumping needle valve, KF seals and clamp combination, four sealed silicone ring, etc. |
Heating system | Heating element: 6 pieces of U-shaped silicon molybdenum rod Heating area length: 280mm Constant temperature zone length: 100mm Working temperature: ≤ 1600 ℃ Maximum temperature: 1650 ℃ Heating rate: ≤ 10 ℃ / min |
Temperature control system | Temperature control using artificial intelligence adjustment technology, with PID adjustment, self-tuning function. 50 section of the cooling program Temperature measuring element: B type double platinum and rhodium thermocouple Constant temperature accuracy: ± 1 ℃ |
HQF-Ⅲ mixing system | Three-way float flowmeter is located on the mobile workbench and can access three different gases at the same time Built-in stainless steel mixing box, each gas pipeline are equipped with check valve Pipeline with PTFE hose, temperature and corrosion resistance Each gas inlet line is equipped with stainless steel needle valve Flow specification: 0.3 ~ 3L / min Control accuracy: ± 5% |
Low vacuum system | A bipolar rotary vane vacuum pump with a vacuum of up to 5x10-1 Torr Stainless steel oil-filled vacuum pressure gauge, good shock resistance |
Built-in temperature measuring system | The temperature measuring element may extend from the edge of the heating zone to the center of the zone. Flange seal to ensure the sealing of the furnace tube Temperature measuring element: B type double platinum and rhodium thermocouple |
Size | High temperature furnace: 660 * 580 * 910mm Mixed air moving table: 800 * 540 * 720mm |
Optional accessories | HQZ mixed gas system, medium and high vacuum system, all kinds of corundum crucible, corundum tube, computer control software, paperless recorder, oxygen content analyzer, cooling water recycling machine. |
