CVD-1200 system consists of open type single(doubel) heating zone furnace, hight temperature molecular pump system, pressure controller and multi-channel high precision digital mass flow control system. It can do test of 0.001Pa mixed gases chemical vapor deposition and diffusion. |
Main function and Features: 1.High Vacuum System: Double stage rotary vane vacuum pump and molecular pump. Max Vacuum can reach 0.0001Pa. 2. Pressure controller to get more precision control of negative gas pressure. 3. Digital mass flow control system consists of several mass flow meter, flow display meter, etc. It can precisionly measure and control of gas flow. 4. KF fast flange which is easy to install and unistall Pipes is connected with top brand Swagelok, no gas leakage. 5. Over temperature, over pressure protection make sure safey operation. |
Main Using: High temperature atmosphere sintering, atmosphere reduction, CVD/CVI experiment in universities, science research institutions, industries, especially for acuum coating, nano-thin film preparation, nanowire growth, drying of the battery material sintering |
Technical Parameters: |
SKGL-1200 | Temp. control system | artificial intelligence technology, with PID control, self - tuning function, 30 segment heating and cooling program |
Heating Element | 0Cr27Al7Mo2 |
Power supply | AC220V 50HZ/60HZ |
Rated power | 4KW |
Tube size | Φ60/Φ80/Φ100*1000mm |
Working temperature | ≤1150℃ |
Max. temp. | 1200℃ |
Temp. accuracy | ±1℃ |
Heating zone length | 440mm or 220mm/220mm |
Heating speed | ≤20℃/min |
Sealing | Stainless steel fast extrusion flange |
ZK-F Vacuum system | Vacuum range | 0.1-0.001Pa |
Max. Vacuum | 4.0*10^-4Pa |
Pump | Double stage rotary vane vacuum pump+Molecular pump |
Measure method | Compound vacuum gauge |
Vacuum Gauge | Resistance gauge+Ionization gauge |
Cooling method | Air cooling |
Power supply | AC220V 50/60HZ |
Speed | 110L/S |
ZDFC-Ⅲ Pressure control system | Range | 5~1*10^-5 Pa |
Pressure(Vacuum) Range | 1~5*10^-3Pa |
Accuracy of Pressure(Vacuum) stable | ±3% |
Controal range | 2.5*10^3~1*10^-4 Pa |
Control accuracy | ± 1% |
HQZ-Ⅲ Mixed gas system | Control method | D07-7K Mass flow meter. D08 Flow display meter |
Flow specification | 0-500SCCM /0-1SLM,(Customizable) |
linearity | ±1%F.S |
Accuracy | ±1%F.S |
Repeatability precision | ±0.2%F.S. |
Response time | ≤2sec |
Pressure resistance | 3MPa |
Gas channel | 3 channels(Customizable) |
Valves | 316 stainless steel |
Pipes | Φ6mm stainless steel tube |
Connection | SwagelokΦ6mm |